Determination of thirteen trace impurity elements in indium tin oxide target material by microwave digestion-inductively coupled plasma mass spectrometry
MO Shu-min, WANG Chang-hua, LI Na, QIU Chang-dan
Guobiao (Beijing) Testing & Certification Co., Ltd., Beijing 100088, China
Abstract：The content of impurity elements in indium tin oxide (ITO) is an important parameter to measure the product performance. The sample was treated in hydrochloric acid by microwave digestion. Cs was selected as the internal standard. 24Mg, 27Al, 52Cr, 58Ni, 63Cu, 64Zn, 90Zr, 208Pb, 205Tl and 111Cd were determined under argon mode. The content of 28Si, 40Ca and 56Fe was determined under hydrogen collision reaction cell mode. The determination of 13 trace impurity elements (including magnesium, aluminum, silicon, calcium, chromium, iron, copper, nickel, zinc, zirconium, cadmium, lead and thallium) in ITO target material by inductively coupled plasma mass spectrometry (ICP-MS) was realized. The experiments showed that the matrix effect could be ignored when the mass concentration of ITO matrix was 1.00mg/mL. The linearity was good for 13 impurity elements in range of 1.0-100ng/mL and the linear correlation coefficients were all higher than 0.9990. The detection limit was 0.002-0.15μg/g. The low limit of determination was 0.007-0.50μg/g. The proposed method was applied for the analysis of 13 trace impurity elements in indium tin oxide target material sample. The relative standard deviation (RSD, n=7) were all less than 5%. The recoveries were between 88% and 114%. The indium tin oxide target material sample was analyzed according to the experimental method. The found results were basically consistent with those obtained by inductively coupled plasma atomic emission spectrometry (ICP-AES).
墨淑敏, 王长华, 李娜, 邱长丹. 微波消解-电感耦合等离子体质谱法测定氧化铟锡靶材中13种痕量杂质元素[J]. 冶金分析, 2019, 39(4): 15-19.
MO Shu-min, WANG Chang-hua, LI Na, QIU Chang-dan. Determination of thirteen trace impurity elements in indium tin oxide target material by microwave digestion-inductively coupled plasma mass spectrometry. , 2019, 39(4): 15-19.
催诣.浅议ITO靶材的制备方法及发展趋势[J].有色矿冶,2013,29(4):36-39.CUI Yi.Shallow analyses the preparation methods and development trend of ITO target[J].Non-ferrous Mining and Metallurgy,2013,29(4):36-39.
黄瑾,郭斌斌,郑清洪.辉光放电质谱法测定氧化铟锡靶材中的元素含量[J].分析试验室,2016,35(7):765-768.HUANG Jin,GUO Bin-bin,ZHENG Qing-hong.Impurities concentration detection in ITO target by glow discharge mass spectrometry[J].Chinese Journal of Analysis Laboratory,2016,35(7):765-768.
[4]
张红梅,陈锐.ITO粉及ITO靶材中铟的测定-EDTA容量法[J].稀有金属,2003,27(1):188-190.ZHANG Hong-mei,CHEN Rui.Determination of indium in ITO powder and ITO target by EDTA titration[J].Chinese Journal of Rare Metals,2003,27(1):188-190.
[5]
吴文启,黄煦,李奋,等.EDTA滴定法测定废铟锡氧化物靶材中铟[J].冶金分析,2007,27(11):37-39.WU Wen-qi,HUANG Xu,LI Fen,et al.Determination of indium in waste indium-tin oxide target by EDTA titration[J].Metallurgical Analysis,2007,27(11):37-39.
[6]
曾艳,武明丽.EDTA滴定法测定铟锡氧化物废靶粉中铟的含量[J].化学分析计量,2017,26(5):91-99.ZENG Yan,WU Ming-li.Determination of indium in ITO waste target powder by EDTA titration[J].Chemical Analysis and Meterage,2017,26(5):91-99.
[7]
孙洪涛,王晓艳,邓培.ICP-AES法测定氧化铟-氧化锡(ITO)超细复合粉末中痕量杂质[J].宁夏工程技术,2003,2(3):232-234.SUN Hong-tao,WANG Xiao-yan,DENG Pei.Determination of trace impurities in In2O3-SnO2 (ITO) ultrafine composite powder by ICP-AES[J].Ningxia Engineering Technology,2003,2(3):232-234.
[8]
王志萍,孙洪涛,王巧.微波消解-电感耦合等离子体原子发射光谱法测定氧化铟锡靶材中11种痕量杂质元素[J].冶金分析,2018,38(5):60-65.WANG Zhi-ping,SUN Hong-tao,WANG Qiao.Determination of eleven trace impurity elements in indium tin oxide target material by inductively coupled plasma atomic emission spectrometry after microwave digestion[J].Metallurgical Analysis,2018,38(5):60-65.
[9]
黄子敬,陈孟君,邓华阳,等.微波消解-ICP-MS混合模式测定动植物源食品中11种金属元素[J].分析试验室,2017,36(1):24-28.HUANG Zi-jing,CHEN Meng-jun,DENG Hua-yang,et al.Determination of 11 trace elements in animal and plant origin food by microwave digestion with ICP-MS in mixed mode[J].Chinese Journal of Analysis Laboratory,2017,36(1):24-28.
[10]
张立峰,张秀艳,张翼明,等.电感耦合等离子体质谱法测定镧镁合金中稀土杂质[J].冶金分析,2014,34(6):33-37.ZHANG Li-feng,ZHANG Xiu-yan,ZHANG Yi-ming,et al.Determination of rare earth impurities in lanthanum-magnesium alloy by inductively coupled plasma mass spectrometry[J].Metallurgical Analysis,2014,34(6):33-37.
