聚焦离子束-双束扫描电子显微镜在硅基芯片缺陷与失效分析中的应用

刘辰, 陈振, 陆裕东, 吕金昊, 蒋亮, 张翠媛, 潘憬

Application of focused ion beam dual-beam scanning electron microscope in defect and failure analysis of silicon-based chip

LIU Chen, CHEN Zhen, LU Yudong, LÜ Jinhao JIANG Liang, ZHANG Cuiyuan, PAN Jing

冶金分析 . 2026, (1): 80 -86 . DOI: 10.13228/j.boyuan.issn1000-7571.013164