Exploration on sustainable operation and management of high precision instrument and equipment based on focused ion beam system
FU Qinqin, FAN Chuanwei, QIN Yuanbin, ZHANG Pengcheng, GUO Chaowei, SHAN Zhiwei
Metallurgical Analysis . 2026, (5): 89 -94 .  DOI: 10.13228/j.boyuan.issn1000-7571.013115

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