Exploration on sustainable operation and management of high precision instrument and equipment based on focused ion beam system

FU Qinqin; FAN Chuanwei; QIN Yuanbin; ZHANG Pengcheng; GUO Chaowei; SHAN Zhiwei

doi:10.13228/j.boyuan.issn1000-7571.013115

FU Qinqin, FAN Chuanwei, QIN Yuanbin, ZHANG Pengcheng, GUO Chaowei, SHAN Zhiwei

Metallurgical Analysis ›› 2026, Vol. 46 ›› Issue (5) : 89-94.

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Metallurgical Analysis ›› 2026, Vol. 46 ›› Issue (5) : 89-94. DOI: 10.13228/j.boyuan.issn1000-7571.013115

Exploration on sustainable operation and management of high precision instrument and equipment based on focused ion beam system

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 46(5): 89-94 https://doi.org/10.13228/j.boyuan.issn1000-7571.013115

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