Research on deep learning recognition method for focused ion beam-based chip defect detection images
LIU Hongxuan, CAO Zhenfeng, SUN Wei, QIU Tingting, WANG Xianhao ZHANG Xiaohui, YANG Minglai, WANG Ying
Metallurgical Analysis . 2026, (1): 114 -121 .  DOI: 10.13228/j.boyuan.issn1000-7571.013160

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