Research on deep learning recognition method for focused ion beam-based chip defect detection images

LIU Hongxuan; CAO Zhenfeng; SUN Wei; QIU Tingting; WANG Xianhao ZHANG Xiaohui; YANG Minglai; WANG Ying

doi:10.13228/j.boyuan.issn1000-7571.013160

LIU Hongxuan, CAO Zhenfeng, SUN Wei, QIU Tingting, WANG Xianhao ZHANG Xiaohui, YANG Minglai, WANG Ying

Metallurgical Analysis ›› 2026, Vol. 46 ›› Issue (1) : 114-121.

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Metallurgical Analysis ›› 2026, Vol. 46 ›› Issue (1) : 114-121. DOI: 10.13228/j.boyuan.issn1000-7571.013160

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Research on deep learning recognition method for focused ion beam-based chip defect detection images

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 46(1): 114-121 https://doi.org/10.13228/j.boyuan.issn1000-7571.013160

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Received	Published
2025-11-29	2026-01-28
Issue Date
2026-05-28

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