Application of focused ion beam dual-beam scanning electron microscope in defect and failure analysis of silicon-based chip
LIU Chen, CHEN Zhen, LU Yudong, LÜ Jinhao JIANG Liang, ZHANG Cuiyuan, PAN Jing
Metallurgical Analysis . 2026, (1): 80 -86 .  DOI: 10.13228/j.boyuan.issn1000-7571.013164

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