Abstract：Several factors influencing the analysis accuracy of glow discharge optical emission spectrometry (GDOES) are discussed based on its quantitative analysis principle.In depth profile analysis, the quantification of concentration depends on whether the calibration curves corrected by the sputtering rate could cover the concentration ranges of all elements or not. The calibration curves should be extended to meet the analysis requirements if necessary. The accuracy of quantitative analysis of depth depends on the consistency between the density calculated by the weighted average method and the actual density. If the difference is large, it could be corrected by software or hardware. When there are organic substances in the sample, the molecular band in the glow discharge plasma will interfere with the emission intensity of other elements, leading to "false peek" in analytical results or large deviations in the quantitative results. Therefore, the analysis results should be identified according to the actual process of the sample. During the comparison between the quantitative depth profile analysis by GDOES with other analytical techniques, the influence of coating uniformity and sampling amount difference should be considered. The repeatability and reproducibility of bulk analysis could meet the requirements of rapid analysis of metal solid samples, and the precision results in the latest national standard experiment has been proved to be satisfactory. In the analysis of trace elements, it is necessary to pay more attention to whether the emission intensity of the element is greatly reduced. One of the reasons is that long time sputtering of low melting-point metals or organic samples will lead to the deposition of few substances onto the lens.
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