辉光放电发射光谱仪器和应用进展

doi:10.13228/j.boyuan.issn1000-7571.011673

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摘要对辉光放电发射光谱的原理进行了介绍。描述了辉光放电发射光谱仪设备的进展,对其在成分分析和表面分析上的一些应用进行了展示。还介绍了辉光谱图深度分辨率模型。最后提出了辉光放电发射光谱以后发展需要解决的问题。

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	余卫华
	李杰
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关键词 ：辉光放电发射光谱(GDOES), 成分分析, 表面分析, 深度分辨率

Abstract：The principle of glow discharge optical emission spectroscopy was introduced. The development of glow discharge optical emission spectrometers was described, and some applications in bulk analysis and surface analysis were demonstrated. The depth resolution model of glow spectrum was also introduced. Finally, the problems that need to be solved in the future for the development of glow discharge optical emission spectroscopy were proposed.

Key words： glow discharge optical emission spectroscopy(GDOES) bulk analysis surface analysis depth resolution

收稿日期: 2021-11-09

ZTFLH:	O657.31
	TF03+1

作者简介: 余卫华(1971—),男,教授级高工,硕士,从事冶金分析方面的研究;E-mail:weihuayu@wisco.com.cn

引用本文:

余卫华, 李杰, 郑凤, 周郑. 辉光放电发射光谱仪器和应用进展[J]. 冶金分析, 2021, 41(12): 68-78. YU Weihua, LI Jie, ZHENG Feng, ZHOU Zheng. Development of glow discharge optical emission spectroscopy instrument and its application. , 2021, 41(12): 68-78.

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http://yjfx.chinamet.cn/CN/10.13228/j.boyuan.issn1000-7571.011673 或 http://yjfx.chinamet.cn/CN/Y2021/V41/I12/68

[1] 陆家和,陈长彦.表面分析技术[M].北京:电子工业出版社,1987.
[2] 郭沁林. X射线光电子能谱[J].物理,2007,36(5):405-410.
GUO Qinlin.X-ray photoelectron spectroscopy[J].Physics,2007,36(5):405-410.
[3] 朱永法.俄歇化学位移及其在表面化学上的应用[J].物理化学学报,1993,9(2):211-217.
ZHU Yongfa.AES chemical shift and application on surface chemistry[J].Acta Physico-Chimica Sinica,1993,9(2):211-217.
[4] 雷雯.俄歇电子能谱学的历史,现状与展望[J].真空与低温(Vacuum and Cryogenics), 1994,13(2):122-124,112.
[5] 朱怡峥,马农农.二次离子质谱的深度分辨本领[J].真空(Vacuum),2000(5):14-17.
[6] 韩小元,卓尚军,王佩玲,等.X射线荧光光谱法测定Zn镀层质量厚度及计算谱线选择问题研究[J].分析试验室,2006,25(1):5-8.
HAN Xiaoyuan,ZHUO Shangjun,WANG Peiling, et al.Determination of the mass thickness of zinc coating by X-ray fluorescence spectrometry[J].Chinese Journal of Analysis Laboratory,2006,25(1):5-8.
[7] 严振庄,谢东,刘亨远. X射线荧光法检测金属镀层厚度[J].河北师范大学学报(自然科学版),1997,21(2):153-155.
YAN Zhenzhuang,XIE Dong,LIU Hengyuan.Determination of metal plating thikness by X ray fluorescence method[J].Journal of Hebei Normal University (Natural Science),1997,21(2):153-155.
[8] 江祖成,田笠卿,陈新坤,等.现代原子发射光谱分析[M].北京:科学出版社,1999:87-88.
[9] Payling R,Jones D,Gower A.In search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part I: Calibration curves[J].Surf. Interface Anal.,1995,23(1):1-11.
[10] Payling R.In search of the ulimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part II: Generalized method[J].Surf. Interface Anal.,1995,23(1):12-21.
[11] GDOES Theory. [Online]Available: https://www.spectruma.de/en/gdoes-theory.html.
[12] Nelis T,Payling R.Glow discharge optical emission spectroscopy:a practical guide[M]. Cambridge:The Royal Society of Chemistry,2003:174.
[13] 余卫华,李江文,于录军,等.辉光放电发射光谱分析中密度的计算和应用[C]//第十六届国际冶金及材料分析测试学术报告会论文集,北京:出版者不详,2014:496-500.
[14] ISO 16962:2005.Surface chemical analysis-Analysis of zinc-and/or aluminium-based metallic coatings by glow-discharge optical-emission spectrometry[S].
[15] W Grimm.Eine neue glimmentladungslampe für die optische emissionsspektralanalyse[J]. Spectrochimica Acta Part B:Atomic Spectrometry, 1968,23(7): 443-454.
[16] R K Marcus,J A C Broekaert.Glow discharge plasmas in analytical spectroscopy[M]. [S.l.]:Wiley,2003:98.
[17] Steiner R E,Barshick C M.Glow discharge optical spectroscopy and mass spectrometry[M].2006.
[18] Ph Belenguer,M Ganciu,Ph Guillot,et al.Pulsed glow discharges for analytical applications[J].Spectrochimica Acta Part B,2009,64:623-641.
[19] Shiva Mohajernia,Anca Mazare,Imgon Hwang,et al.Depth elemental characterization of 1D self-aligned TiO₂ nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)[J].Applied Surface Science,2018,442:412-416.
[20] Yoko N,Kenji K,Kikuyasu S,et al.Transient response of the emission signal controlled by pulsated bias current in pulsed radio-frequency glow discharge optical emission spectrometry[J].Spectrochimica Acta Part B:Atomic Spectroscopy,2018,146:50-56.
[21] L Wilken,V Hoffmann,K Wetzig.In situ depth measurements for GD-OES[J].J. Anal. At. Spectrom.,2003,18:1133-1140.
[22] S Gaiaschi,S Richard,P Chapon,et al.Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling[J].J. Anal. At. Spectrom.,2017,32:1798-1804.
[23] 万真真,李小佳,王永清,等.一种用于辉光放电光谱深度分析的激光实时测量新方法[J]. 光谱学与光谱分析,2011,31(9):2536-2541.
WAN Zhenzhen,LI Xiaojia,WANG Yongqing,et al.A real-time determination method with laser measurement for depth profile analysis of GD-OES[J].Spectroscopy and Spectral Analysis,2011,31(9):2536-2541.
[24] 张翔辉,宋立伟,赵宇.钢中砷、铅、锑、锡的辉光放电原子发射光谱分析[J].冶金分析,2005,25(5):32-34.
ZHANG Xianghui,SONG Liwei,ZHAI Yu.Analysis of arsenic,lead,antimony and tin in steel by glow discharge optical atomic emission spectrometry[J].Metallurgical Analysis,2005,25(5):32-34.
[25] 邓军华,曹新全,李化.辉光放电发射光谱法测定硅钢薄板中微量硼元素[J].中国无机分析化学,2011(3):39-42.
DENG Junhua,CAO Xinquan,LI Hua.Determination of trace boron element in silicon steel sheets by glow discharge optical emission spectrometry (GD-OES)[J].Chinese Journal of Inorganic Analytical Chemistry,2011(3):39-42.
[26] 刘洁.辉光放电光谱法分析超薄钢板中各元素的含量[J].河北冶金,2013(12):48-50.
LIU JIe.Determination of contents of various elements in ultra thin steel sheet with glow discharge optical emmision spectrograph[J].Hebei Metallurgy,2013(12):48-50.
[27] 高品,于媛君.辉光放电光谱法分析锌合金中多元素含量[J].鞍钢技术,2016(3):36-40.
GAO Pin,YU Yuanjun.Analysis on content of elements in zinc alloy by glow discharge spectrometry[J].Angang Technology,2016(3):36-40.
[28] 滕璇,李小佳,王海舟.中低合金钢的辉光放电发射光谱分析研究[J].冶金分析,2003,23(5):1-5.
TENG Xuan,LI Xiaojia,WANG Haizhou.Study on the analysis of middle-low alloy steels by dc-glow discharge optical emission spectrometry[J].Metallurgical Analysis,2003,23(5):1-5.
[29] 张毅,陈英颖,张志颖.辉光放电光谱法在钢铁成分分析中的应用[J].冶金分析,2002,22(1):66-68.
ZHANG Yi,CHENG Yingying,ZHANG Zhiying.Applications of glow discharge optical emission spectrometry for bulk analysis in iron and steel industry[J].Metallurgical Analysis,2002,22(1):66-68.
[30] 梁峙,周桂海,吴小红,等.辉光放电原子发射光谱法测定钢中超低碳含量[J].现代仪器,2012,18(2):72-74.
LIANG Zhi,ZHOU Guihai,WU Xiaohong,et al.Analysis of ultra-low content in steel by glow-discharge atomic emission spectrometry[J].Modern Instruments,2012,18(2):72-74.
[31] 韩永平,李小佳,王海舟.射频辉光放电发射光谱法测定不锈钢成分的研究[J].冶金分析,2007,27(7):8-12.
HAN Yongping,LI Xiaojia,WANG Haizhou.Study on determination of components in stainless steel by radio frequency glow discharge optical emission spectrometry[J].Metallurgical Analysis,2007,27(7):8-12.
[32] 胡维铸,范连明.射频辉光放电发射光谱法测定中低合金钢中痕量钙[J].冶金分析,2011,31(7):31-34.
HU Weizhu,FAN Lianming.Determination of trace calcium in middle-low alloy steel by radio frequency glow discharge optical emission spectrometry[J].Metallurgical Analysis,2011,31(7):31-34.
[33] 中华人民共和国国家质量监督检验检疫总局,中国国家标准化管理委员会.GB/T 22368—2008 低合金钢多元素含量的测定辉光放电原子发射光谱法(常规法)[S].北京:中国标准出版社,2008.
[34] 中华人民共和国国家质量监督检验检疫总局,中国国家标准化管理委员会.GB/T 34209—2017 不锈钢多元素含量的测定辉光放电原子发射光谱法[S].北京:中国标准出版社,2017.
[35] ISO 19272-2015 Low alloyed steel-Determination of C, Si, Mn, P, S, Cr, Ni, Al, Ti and Cu-Glow discharge optical emission spectrometry (routine method) [S].
[36] 徐升美,张功抒,张洪度,等.辉光放电发射光谱逐层分析技术及其在钼合金涂层分析中的应用[J].金属学报,1979,15(1):126-135.
XU Shengmei,ZHANG Gongshu,ZHANG Hongdu,et al.In-depth compositional profile analysis by flow discharge emission spectroscopy and its application to surface coating analysis of certain molybdenum alloy sheet[J].Acta Metallurgica Sinica,1979,15(1):126-135.
[37] 郜长福,张洪度,徐升美,等.合金钢渗硼层硼化物相逐层组成的辉光光谱分析[J].金属学报,1983,19(4):137-140.
GAO Changfu,ZHANG Hongdu,XU Shengmei,et al.In depth phase analysis of boronized layer on alloys by glow discharge optical emission spectroscopy[J].Acta Metallurgica Sinica,1983,19(4):137-140.
[38] K Shimizu,H Habazaki,P Skeldon,et al.Impact of RF-GD-OES in practical surface analysis[J].Spectrochimica Acta Part B: Atomic Spectroscopy,2003,58(9):1573-1583.
[39] 史玉涛,李小佳,王海舟.镀锡钢板辉光放电发射光谱法定量深度分析研究[J].冶金分析,2007,7(2):1-7.
SHI Yutao,LI Xiaojia,WANG Haizhou.Quantitative depth profile analysis of tinplate with glow discharge optical emission spectrometry[J].Metallurgical Analysis,2007,7(2):1-7.
[40] 于媛君,高品,邓军华,等.辉光放电发射光谱法测定钢板镀锌层中铅镉铬[J].冶金分析, 2015,35(9):1-7.
YU Yuanjun,GAO Pin,DENG Junhua,et al.Determination of lead, cadmium and chromium in galvanized layer of steel plate by glow discharge optical emission spectrometry[J].Metallurgical Analysis,2015,35(9):1-7.
[41] 徐永林,张东生,倪建. 辉光放电光谱法测定合金化镀锌板镀层中铁含量[J].冶金分析, 2012,32(1):23-28.
XU Yonglin,ZHANG Dongsheng,NI Jian.Determination of iron content in the coating of alloying galvanized sheet by glow discharge spectrometry[J].Metallurgical Analysis,2012,32(1):23-28.
[42] 张毅,陈英颖,张志颖.辉光放电光谱法分析镀锌钢板[J].理化检验(化学分册),2004,40(4):191-197.
ZHANG Yi,CHEN Yingying,ZHANG Zhiying.Analysis of galvanized steel sheets by glow discharge AES[J].Physical Testing and Chemical Analysis (Part B:Chemical Analysis),2004,40(4):191-197.
[43] 中华人民共和国工业和信息化部.YB/T 4475—2015 钢板及钢带锌和铝金属镀层分析辉光放电原子发射光谱法[S].北京:冶金工业出版社,2015.
[44] Soraya Bouhieda,Fabien Rouillard,Vincent Barnier,et al.Selective oxidation of chromium by O₂ impurities in CO₂ during initial stages of oxidation[J].Oxidation of Metals,2013,80:493-503.
[45] Cody Falconer,William H Doniger,Louis Bailly-Salins,et al.Non-galvanic mass transport in molten fluoride salt isothermal corrosion cells[J].Corrosion Science,2020,177:108955.
[46] Iris De Graeve,Ine Schoukens,Alex Lanzutti,et al.Mechanism of corrosion protection of hot-dip aluminium-silicon coatings on steel studied by electrochemical depth profiling[J]. Corrosion Science,2013,76:325-336.
[47] Rosiana Boniatti,Aline L Bandeira,Ângela E Crespi,et al.The influence of surface microstruture and chemical composition on corrosion behavior in fuel-grade bio-ethanol of low-alloy steel modified by plasma nitro-carburizing and post-oxidizing[J].Applied Surface Science,2013,280:156-163.
[48] Hiroki Habazaki,Rokuro Nishimura,Kenji Okitsu,et al.The effects of filmthickness and incorporated anions on pitting corrosion of aluminum with barrier-type oxide films formed in neutral borate and phosphate electrolytes[J].Journal of Solid State Electrochemistry,2014,18(2):369-376.
[49] M Mouanga,P Bercot,J Y Rauch.Comparison of corrosion behaviour of zinc in NaCl and in NaOH solutions. Part I: Corrosion layer characterization[J].Corrosion Science,2010,52:3984-3992.
[50] Ch Jagadeeswara Rao,S Ningshen,John Philip.Atmospheric air oxidation of 9Cr-1Mo steel: Depth profiling of oxide layers using glow discharge optical emission spectrometry[J]. Spectrochimica Acta Part B: Atomic Spectroscopy,2020,172:105973.
[51] K Shimizu,H Habazaki,P Skeldon,et al.Radiofrequency GDOES: a powerful technique for depth proliling analysis of thin films[J].Surf. Interface Anal.,2003,35(7):564-574.
[52] K Shimizu,R Payling,H Habazak,et al.Rf-GDOES depth profiling analysis of a monolayer of thiourea adsorbed on copper[J].J. Anal. At. Spectrom.,2004,19(5):692-695.
[53] 张毅,陈英颖,吴则嘉,等.辉光放电光谱法分析掺杂纳米硅薄膜的研究[C]//第十一届冶金及材料分析测试学术报告会论文集,北京:出版者不详,2004:253-258.
[54] 何晓蕾,张毅,蓝闽波,等.辉光放电光谱法定量分析金属材料表面纳米级薄膜的研究[J]. 理化检验(化学分册),2006,42(9):693-698.
HE Xiaolei,ZHANG Yi,LAN Minbo,et al.Study of analysis of nano film on metal surface by glow discharge emission spectrometry[J].Physical Testing and Chemical Analysis (Part B:Chemical Analysis),2006,42(9):693-698.
[55] 张毅,邬君飞,缪乐德,等.辉光放电原子发射光谱法测定钢铁表面纳米尺度薄膜厚度的重复性和再现性[J].宝钢技术,2010(4):41-46.
ZHANG Yi,WU Junfei,MIAO Lede,et al.Repeatability and reproducibility of nano-scale film thickness on steel surface by glow discharge optical emission spectrometry[J].Bao-steel Technology,2010(4):41-46.
[56] 中华人民共和国国家质量监督检验检疫总局,中国国家标准化管理委员会.GB/T 22462—2008 钢表面纳米、亚微米尺度薄膜元素深度分布的定量测定辉光放电原子发射光谱法[J].北京:中国标准出版社,2008.
[57] Hofmann S.Atomic mixing, surface roughness and information depth in high-resolution AES depth profiling of a GaAs/AlAs superlattice structure[J].Surface and Interface Analysis,1994,21(9):673-678.
[58] 刘毅.溅射深度剖析定量分析及其在薄膜材料中的应用[D].汕头:汕头大学,2014.
[59] 韩逸山.辉光放电光谱仪(GDOES)深度剖析定量分析及择优溅射对深度分辨率影响的研究[D].汕头:汕头大学,2018.
[60] Hao Yang,Songyou Lian,Patrick Chapon,et al.Quantification of high resolution pulsed RF GDOES depth profiles for Mo/B C/Si nano-multilayers[J].Coatings,2021,11(6):612.