On electrical and optical properties of very thin oxide/6H-SiC structures

Pincik E, Kobayashi H, Madani M, Rusnak J, Takahashi M, Mikula M, Brunner R

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Metallurgical Analysis ›› 2011, Vol. 31 ›› Issue (12) : 15-20.

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On electrical and optical properties of very thin oxide/6H-SiC structures

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 31(12): 15-20

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