Progress in methods to improve the utilization ratio and erosion uniformity of target in glow discharge magnetron sputtering

WANG Yongqing; SHEN Yixuan; WAN Zhenzhen; YU Xing; WANG Haizhou

doi:10.13228/j.boyuan.issn1000-7571.011324

WANG Yongqing, SHEN Yixuan, WAN Zhenzhen, YU Xing, WANG Haizhou

Metallurgical Analysis ›› 2021, Vol. 41 ›› Issue (8) : 54-63.

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Metallurgical Analysis ›› 2021, Vol. 41 ›› Issue (8) : 54-63. DOI: 10.13228/j.boyuan.issn1000-7571.011324

Progress in methods to improve the utilization ratio and erosion uniformity of target in glow discharge magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(8): 54-63 https://doi.org/10.13228/j.boyuan.issn1000-7571.011324

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Received	Published
2020-10-23	2021-08-28
Issue Date
2020-10-23

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