Study on excitation test of micro inductively coupled plasmaexcitation source with three-dimensional spiral coil

WANG Yong-qing, YANG Yong-wang, WAN Zhen-zhen, SHEN Yu-min, LIU Qing-xue

Metallurgical Analysis ›› 2019, Vol. 39 ›› Issue (1) : 8-14.

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Metallurgical Analysis ›› 2019, Vol. 39 ›› Issue (1) : 8-14. DOI: 10.13228/j.boyuan.issn1000-7571.010507

Study on excitation test of micro inductively coupled plasmaexcitation source with three-dimensional spiral coil

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 39(1): 8-14 https://doi.org/10.13228/j.boyuan.issn1000-7571.010507

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