基于聚焦离子束系统的高精仪器设备可持续运行管理探索
付琴琴, 范传伟, 秦元斌, 张朋诚, 郭朝维, 单智伟
Exploration on sustainable operation and management of high precision instrument and equipment based on focused ion beam system
FU Qinqin, FAN Chuanwei, QIN Yuanbin, ZHANG Pengcheng, GUO Chaowei, SHAN Zhiwei
冶金分析
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2026, (5): 89
-94
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DOI: 10.13228/j.boyuan.issn1000-7571.013115
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