立体螺旋线圈微型电感耦合等离子体激发源激发测试研究
王永清, 杨永旺, 万真真, 申玉民, 刘庆学
Study on excitation test of micro inductively coupled plasmaexcitation source with three-dimensional spiral coil
WANG Yong-qing, YANG Yong-wang, WAN Zhen-zhen, SHEN Yu-min, LIU Qing-xue
冶金分析
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2019, (1): 8
-14
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DOI: 10.13228/j.boyuan.issn1000-7571.010507