湿法化学制备的超薄和极薄二氧化硅/硅膜的光学性能研究
KOPANI M, KOBAYASHI H, TAKAHASHI M, MIKULA M, IMAMURA K, VOJTEK P , PINCIK E
冶金分析 ›› 2012, Vol. 32 ›› Issue (10) : 64-67.
湿法化学制备的超薄和极薄二氧化硅/硅膜的光学性能研究
Study on optical properties of ultra-thin and very-thin silicon oxide/silicon structures prepared by chemical wet methods
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