Abstract：This paper introduces the difference between chemical analysis and physical testing. It points out that the quantitative surface analysis can be performed using chemical analysis methods. The application of chemical analysis methods such as selective dissolution, electrochemical dissolution, and X-ray fluorescence analysis in surface analysis is summarized. The application and examples of glow discharge emission spectroscopy in surface analysis are mainly introduced. It can not only provide the distribution of element content in depth direction of the sample, but also give the thickness of the special phase in combination with the characteristics of the phase. By virtue of its rapid layer-by-layer exfoliation, it can also be used in sample pretreatment for physical surface analysis methods such as scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS).
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