X-ray photoelectron spectroscopy investigation of argon ion sputtered tin oxides and solder alloy
HU Juntao1, ZHAO Minglu2, YANG Shiyu1, CAI Shanshan1, LIU Chen1, FU Zewei*1
1. Research and Development Center, Yunnan Tin Group (Holding) Co., Ltd., Kunming 650101, China; 2. Yunnan Tin Industry Tin Material Co., Ltd., Kunming 650217, China
Abstract：The chemical damages of stannic oxide (SnO2) and stannous (SnO) oxide under various argon ion bombardment beam energies were quantitatively investigated by X-ray photoelectron spectroscopy (XPS) combined with the depth profile technique.After sputtered using the ion beam energies of 0.5, 1 and 2 keV, no obvious chemical damages on SnO2 were observed. However,SnO was reduced in varying degrees,and 7.0%,15.3%,and 20.6% of elemental Sn were generated, respectively. The results also indicated that the reduction degree of Sn2+ was almost same at fixed ion beam energy but different current. Therefore, it would be better to use the lowest available beam energy to limit the chemical damage when profiling the tin oxide surface by XPS and depth profile technique. The spectra of Sn valence band, 4d and 3d core levels were also qualitatively discussed. The selection of Sn 3d5 spectrum for qualitative analysis of Sn valence was determined. The obtained spectral parameters of Sn0, Sn2+ and Sn4+ were used to quantitatively analyze the variation of Sn valence with the depth using the simulated wave-soldering tin-copper solder as an example. The results showed that the outmost surface was primarily dominated by SnO2, and then altered to SnO gradually.
胡俊涛, 赵明陆, 杨士玉, 蔡珊珊, 刘晨, 符泽卫. 氩离子溅射锡氧化物及焊料合金的光电子能谱探究[J]. 冶金分析, 2022, 42(5): 21-28.
HU Juntao, ZHAO Minglu, YANG Shiyu, CAI Shanshan, LIU Chen, FU Zewei. X-ray photoelectron spectroscopy investigation of argon ion sputtered tin oxides and solder alloy. , 2022, 42(5): 21-28.
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