Role of K factor in ZAF iteration calculation and concrete analysis of ZAF correction coefficient for specimen with strong matrix effect
ZHANG Xiaofeng1, HU Jinsheng2, LI Ming3, ZHOU Zihao3, QIAO Qiao1, ZHOU Guangxue4
1. Central Iron and Steel Research Institute Co., Ltd.,Beijing 100081,China; 2. JEOL(BEIJING)Co., Ltd.,Beijing 100089,China; 3. Analytical Center,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China; 4. Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China
Abstract：At present,ZAF method is the most commonly used correction method for quantitative analysis by electron probe microanalysis(EPMA).The essential of ZAF method is to accurately measure the K factor of each element in the sample,and then the iterative calculation (mathematical correction) of K factors are conducted.The understanding of this correction process is helpful for the correct and accurate setting of experiment conditions in quantitative analysis.For the samples with high content of ultra-light elements or strong matrix effect,the K factors have great difference with the actual concentration.Meanwhile,the correction coefficients are also higher.In this case,the accurate measurement of K factors is especially important.In this paper,the mathematical process of iterative calculation for ZAF method was deducted,indicating that K factor was the core of ZAF quantitative analysis.Based on the quantitative results of micro-region analysis of CrTiAlC magnetron sputtering material(the mass fraction of carbon was about 8%),the physical reason for causing great difference between K factor and actual concentration of C and Al were analyzed,and each item of ZAF correction coefficients were investigated.The mathematical iteration process of ZAF quantitative analysis and the parameter setting for quantitative analysis of sample system with strong matrix effect could be further understood.
张晓峰, 胡晋生, 李明, 周子浩, 乔桥, 周广学. K因子在ZAF迭代计算中的作用和强基体效应样品中ZAF修正系数的具体分析[J]. 冶金分析, 2024, 44(4): 17-22.
ZHANG Xiaofeng, HU Jinsheng, LI Ming, ZHOU Zihao, QIAO Qiao, ZHOU Guangxue. Role of K factor in ZAF iteration calculation and concrete analysis of ZAF correction coefficient for specimen with strong matrix effect. , 2024, 44(4): 17-22.
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