Abstract：The high-purity oxalic acid is an important reagent in the electronics industry. Its purity and cleanliness have important influence on the rate of finished products, the electrical property and reliability of products. If the impurities are determined by the chemical wet method, the pretreatment process will be complicated. Due to the lack of corresponding standard reference materials, the elemental fractionation effect and matrix effect cannot be well corrected, which limits the application of laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) in quantitative analysis.The influence of laser ablation conditions on the determination results by LA-ICP-MS was systematically investigated. A series of high-purity oxalic acid calibration standard samples were prepared after drying and grinding by adding different amounts of standard solutions of analytes. Meanwhile, the actual sample was also prepared to tablets. The determination of four impurity elements including Zn, Ni, Ba and Pb in high-purity oxalic acid by LA-ICP-MS was realized. Under the optimized experimental conditions, the linear ranges of elements were between 50.0 ng/g and 600.0 ng/g. The correlation coefficients were higher than 0.98, and the detection limits were in the range of 3.2-21.1 ng/g. The contents of Zn, Ni, Ba and Pb in different six bathes of high-purity oxalic acid sample were determined according to the experimental method. Each sample was determined for 5 times. Meanwhile, the method of ICP-MS after microwave digestion was also used for comparison. The results showed that two methods had good consistency. The relative standard deviations (RSD, n=5) were between 3.0% and 15%. One sample was determined repeatedly within three days, and the RSDs (n=5) were between 5.7% and 16%.
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