Abstract：Inductively coupled plasma mass spectrometer (ICP-MS) has high sensitivity for element analysis, but meanwhile, it is also easily affected by polyatomic ions and oxide ions. A kind of semiconductor temperature control device based on ARM digital control was introduced. This proposed device was equipped with high-precision temperature sensor and analog-digital converter (ADC) for the collection of temperature information in real time. The refrigeration output of semiconductor temperature control device was timely controlled by ARM processor, realizing the closed-loop regulation and accurate control of temperature in the spray chamber. The range of temperature regulation was +20--5℃, and the precision was ±0.1℃. The experimental results showed that the design of this system was reliable and stable, which could improve the performance of instrument, for example, to reduce the yield of oxides (represented by CeO/Ce, the yield of oxide ions was reduced from 10% to about 6% after adding semiconductor refrigeration), to improve the signal strength and stability. The developed semiconductor temperature-control device could meet the requirements for improving the performance of mass spectrometer
李明, 李凯, 唐兴斌, 任立志. 一种半导体控温装置的研制及其在电感耦合等离子体质谱仪上的应用[J]. 冶金分析, 2019, 39(6): 60-64.
LI Ming, LI Kai, TANG Xing-bin, REN Li-zhi. Development of a semiconductor temperature control device and its application in inductively coupled plasma mass spectrometer. , 2019, 39(6): 60-64.
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