Abstract：The impurity elements in zirconium and zirconium alloy were commonly studied, but there were few reports on the analysis of chemical composition in high purity zirconium. On the basis of discussing the mass spectrometric interferences of various impurity elements, the determination method of 36 trace impurities such as Na, Al, Si, P, Ti, V, Cr and Fe in high purity zirconium by glow discharge mass spectrometry (GDMS) was established by selecting the proper isotopes and resolution rates. The instrumental parameters were optimized and the final conditions were selected: the argon flow rate was 370mL/min, the discharge current was 32mA, and the pre-sputtering time was 15min. Trace impurity elements in high purity zirconium sample was determined according to the experimental method. The relative standard deviations (RSD, n=7) of determination results were less than 30%. For the impurity elements with mass fraction higher than 0.1μg/g, the RSDs (n=7) were all less than 10%. The determination results were compared with those obtained by inductively coupled plasma mass spectrometry (ICP-MS). The results showed good consistence.
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