Abstract：In order to measure the suitability of the carburizing process, it is necessary to accurately determine the case depth and carbon concentration. A quick and accurate method was used to characterize the case depth and carbon concentration of 18CrNiMo7-6 steel. Firstly, the accuracy of electron probe method for the determination of case depth was verified by chemical method. Secondly, the results of electron probe method and hardness method were compared. The results of two methods for determining the case depth were consistent, while the relationship between case depth and carbon concentration was additionally shown by electron probe method. Finally, the microstructure of the carburized layer and the matrix was observed by metallographic method. Since the case depth exceeded the measurement range of metallographic method, the results could not be compared. In summary, electron probe method can obtain both case depth and carbon concentration, which is the effective method for accurately characterizing the carburized layer, and can be used as a basis for measuring the suitability of the carburizing process.
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