The phases in ferrovanadium before and after acid dissolution were analyzed and compared by X-ray diffraction. It was found that the main composition of residues after acid dissolution was silicon-aluminum oxide. Therefore, the sample could be treated with mixed acid by microwave digestion technology to increase the reaction temperature at high pressure. In this study, the sample was dissolved with nitric acid-hydrochloric acid-hydrofluoric acid mixture and treated by microwave digestion with tow-step temperature rising. Si 251.611nm, Al 394.401nm, Mn 257.610nm, P 178.284nm, As 189.042nm, Cu 324.754nm and Ni 231.604nm were selected as the analytical line. The calibration curve was prepared by matrix matching method to eliminate the influence of matrix effect. The simultaneous determination of silicon, aluminum, manganese, phosphorus, arsenic, copper and nickel impurities in ferrovanadium by inductively coupled plasma atomic emission spectrometry (ICP-AES) with microwave digestion was established. The linear correlation coefficients (r) of calibration curves for testing elements were all higher than 0.9995. The detection limits of elements in this method were in range of 0.0001%-0.0013% (mass fraction). The proposed method was applied for the determination of silicon, aluminum, manganese, phosphorus, arsenic, copper and nickel in two ferrovanadium standard samples. The relative standard deviations (RSD, n=8) of determination results were less than 4%, and the found results were consistent with the certified values.