Influence factors discussion on detection of inclusions by scanning electron microscope
ZHANG Shu-lan1, XU Hai-feng1,2, DU Min1, WANG Hui1, WANG Chang*1
1. Central Iron and Steel Research Institute,Beijing 100081,China 2. College of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China
Abstract:The effects of parameter setting on detection of inclusions by scanning electron microscope (SEM) were investigated. The influences of magnification time, searching grid size, accelerating voltage and working distance on measured dimension and quantity of inclusions were discussed. The results showed that the average quantity of detected inclusions decreased with the decrease of magnification time and searching grid. Meanwhile, the average size of inclusions increased. The average size and minimum size of inclusions in experimental steel was about 4 μm and 1 μm, respectively, under the following conditions: the magnification time was reduced to about 100 times, the searching grid was 512×512, the accelerating voltage was 25 kV and the working distance was 17.5 mm. Secondly, with the increase of working distance and the decrease of accelerating voltage, the quantity of detected inclusions increased while the average size decreased. It was because that the resolution of images was improved with the increase of working distance and the decrease of accelerating voltage. Therefore, many small inclusions and precipitates could be detected in test process. In other words, for the detection of tiny inclusions and precipitates, the working distance should be increased or the working voltage should be decreased. Particularly, during the accurate detection of very tiny MnS inclusions, the working distance should be increased to 20.5 mm or the accelerating voltage was decreased to less than 15 kV. The experiments with different settings of measurement area indicated that the determination results were more reliable and representative when the detection area was higher than 20 mm2 for the proposed test material.
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ZHANG Shu-lan, XU Hai-feng, DU Min, WANG Hui, WANG Chang. Influence factors discussion on detection of inclusions by scanning electron microscope. , 2017, 37(12): 7-14.
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