Abstract：Glow discharge optical emission spectroscopy (GD-OES) is a useful surface analysis technology. A calibration curve covering wide concentration range of major elements in the coating and matrix can be obtained through sputtering model. The profile of intensity-time which was obtained directly can be transformed into the profile of concentration-depth using the calibration curve. The density of each sputtering layer should be calculated during transformation. The defect of this quantitative model is that the density of each sputtering layer cannot be calculated correctly. The electronegativities of the elements in the compound determine the bond characters, and then the distance of the atoms. The distance of the atoms in the compound is the key point of the theoretical calculation of the density. It is practical that all substance was classified and different density calculation models were set up. For the alloy layer, the calculation of the density can be done by assuming the metal atoms were closely packed. The densities value of the elementary substance and pure compounds can be obtained from the database directly. For the mixture of alloy and compound, the calculation of the density can be done by assuming the metal atoms and the compound were also closest packed themselves and each other. The calculation of densities is somewhat limited in the process of GD-OES, but it achieved some good results in some applications.
张强基.表面分析技术及其在材料科学中的应用[J]. 理化检验:物理分册(Physical Testing and Chemical Analysis Part A: Physical Analysis),2000,36(3):99-102.
[3]
江祖成,田笠卿,陈新坤,等.现代原子发射光谱分析[M]. 北京:科学出版社,1999:87-88.
[4]
Payling R, Jones D, Gower A. In search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part I: Calibration curves[J]. Surf. Interface Anal.,1995,23(1):1-11.
[5]
Payling R. In search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part II: Generalized method[J]. Surf. Interface Anal.,1995,23(1):12-21.
[6]
Shimizu K,Habazaki H,Skeldon P,et al. Impact of RF-GD-OES in practical surface analysis[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 2003, 58(9):1573-1583.
Nelis T, Payling R. Glow Discharge Optical Emission Spectroscopy: A Practical Guide[M]. Cambridge:The Royal Society of Chemistry,2003:174.
[15]
ISO 16962:2005 Surface chemical analysis——Analysis of zinc- and/or aluminium-based metallic coatings by glow-discharge optical-emission spectrometry[S].
