Abstract：The fractionation effect of laser energy, ablation aperture, laser frequency, off-focus distance, ablation time on the determination of elements in high temperature nickel-based supperalloy such as B,Mg,P,Cu,Zn,Ga,As,Ag,In,Cd,Sn,Sb,Tl,Pb,Bi by inductively coupled plasma mass spectrometry (ICP-MS) was investigated with 213 nm laser system. It was indicated through experiment that the absolute fractionation factor of trace element varied along with the change of the above parameters, among which the main influence factors were off-focus distance and ablation aperture. When laser output energy was 70%, 80% and 90%, the absolute fractionation factor of most elements was 0.95-1.15; when laser frequency was 10 Hz and 15 Hz, the absolute fractionation factor of most elements was 1.0-1.1; when ablation aperture was 65, 80 and 100 μm, the absolute fractionation factor of each element was 0.90-1.15; when the off-focus distance varied between +100 and -100 μm, the absolute fractionation factor of each element was 0.90-1.1; when the ablation time was 60-120 s, the fractionation factor of most element was 0.90-1.1. Under optimized conditions, the variation of element signal along with time during ablation process could be effectively corrected with 60Ni or 47Ti as internal standard. After correction, the fractionation factor of most elements was in the range of 0.95-1.1, but along with the prolonging of ablation time, the correction effect decreased.
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