Abstract：This paper provides an overview on the gas analysis in metals with reference to all the gas elements in the periodic table as well as carbon and sulfur. It’s proposed that the conventional gas analysis has expanded from oxygen, nitrogen, hydrogen, carbon and sulfur to helium and argon. Gas analysis involves increasingly more types of materials, from metals and alloys to metallurgical furnace charges, metal oxides and ceramic materials, to name a few. The detection limit for gas analysis has been constantly renewed, toward both the lower and higher directions. New pulse heating-mass spectrometry have been applied to the gas analysis in metals and achieved simultaneous determination of four elements including oxygen, nitrogen, hydrogen and argon, so it is possible to boost changes in gas analysis. Spark source atomic emission spectrometer, X-ray fluorescence spectrometer and other non-special gas analysis instruments are also employed. For example, such means of microscopic analysis as secondary ion mass spectrometry (SIMS), ion probe (IM) and electron probe (EP) has been used as adjuncts in the gas analysis in metals, but they may grow into the major means as they develop.
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