Abstract：The state of standard sample and test steel plate was analyzed by electron probe micro-analyzer(EPMA). The results showed that EPMA could effectively evaluate the various valence states of Fe in oxide scale on steel surface. The comparison method of Lβ/Lα peak intensity ratio of Fe element was the most practical. This ratio was compared with the Lβ/Lα peak intensity ratio of Fe inreference materials, then,the state of Fe at various positions in oxide scale of test sample could be evaluated. Thus, the identified phases were Fe2O3, Fe3O4, FeO or pure Fe. After several tests, the Lβ/Lα peak intensity ratio of Fe in Fe2O3, Fe3O4, FeO and pure Fe was 0.36, 0.41, 0.47 and 0.08, respectively. The maximum statistical uncertainty was 0.02. Based on the difference of Lβ/Lα peak intensity ratio of Fe, the phase in various gray regions of scale in sectional sample could be identified by EPMA. Moreover, the state of oxide scale defect on sample surface could also be analyzed.
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