Determination of sodium,tungsten,iron,zinc,titanium and manganese in aluminum nitride powder by super microwave digestion-inductively coupled plasma mass spectrometry with collision cell
WU Qianye, SUN Jianmin, ZHANG Weiquan, FU Luoling, LI Ying, LI Jian
Hangzhou PuYu Technology Development Co.,Ltd.,Hangzhou 311300, China
Abstract：Aluminum nitride powder is the raw material for the preparation of aluminum nitride materials. The content of impurity metal elements in aluminum nitride powder will have an important impact on the thermal conductivity and dielectric properties of aluminum nitride products. In experiments, the samples were treated by super microwave digestion with mixture of sulfuric acid and phosphoric acid, which solved the problem that the aluminum nitride powder sample was difficult to be dissolved completely. 23Na, 182W, 54Fe, 66Zn, 46Ti and 55Mn were selected as the isotopes to be measured. The flow rate of helium was controlled at 1.52 mL/min to eliminate the mass spectrum interference using helium collision cell technology mode (CCT mode). 50 μg/L of 89Y was used to correct 23Na, 54Fe, 66Zn, 46Ti and 55Mn, while 50 μg/L 185Re was used to correct 182W. Consequently, a method for the determination of six impurity metal elements (including sodium, tungsten, iron, zinc, titanium and manganese) by inductively coupled plasma mass spectrometry (ICP-MS) with collision cell was established. Under the optimized experimental conditions, the limits of detection for six elements were in range of 0.03-0.64 mg/kg, and the limits of quantification were in range of 0.10-2.13 mg/kg. The aluminum nitride powder sample was determined according to the experimental method. The relative standard deviations (RSD, n=6) of determination results for six elements were all less than 4%. The recoveries were between 96% and 103%. The method comparison tests were conducted by inductively coupled plasma atomic emission spectrometry (ICP-AES) and graphite furnace atomic absorption spectrometry (GF-AAS), and the determination results were basically consistent with those obtained by the experimental method.
吴浅耶, 孙建民, 张维权, 付罗岭, 李鹰, 李剑. 超级微波消解-碰撞池-电感耦合等离子体质谱法测定氮化铝粉中钠钨铁锌钛锰[J]. 冶金分析, 2022, 42(7): 19-25.
WU Qianye, SUN Jianmin, ZHANG Weiquan, FU Luoling, LI Ying, LI Jian. Determination of sodium,tungsten,iron,zinc,titanium and manganese in aluminum nitride powder by super microwave digestion-inductively coupled plasma mass spectrometry with collision cell. , 2022, 42(7): 19-25.
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