Abstract：In order to understand the accuracy of the quantitative analysis results by scanning electron microscope (SEM)-energy dispersive spectrometry (EDS), the nickel content in SUS-101g stainless steel was quantitatively determined by SEM-EDS. The uncertainty components that affected the quantitative results were discussed separately including as repeatability measurement, correction methods, certified reference materials, laboratory environment and equipment calibration certificates. The uncertainty components of each influencing factor were calculated and synthesized to obtain the expanded uncertainty. The whole measurement process was conducted according to the standard method, i.e., GB/T 17359-2012 Microbeam analysis-Quantitative analysis by energy dispersive spectrometry. The evaluation results of measurement uncertainty showed that the source of uncertainty mainly included measurement repeatability, correction methods and equipment calibration certificates, while the influence of certified reference materials and laboratory environment could be ignored according to the actual situation. The uncertainty report could be expressed as: the measurement result of nickel content was 9.92% in mass fraction, and the expanded uncertainty was U=0.74% with coverage factor of k=1.96.
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WU Yuan-yuan, SHI Li-li, ZHANG Ke. Uncertainty evaluation on measurement result of nickel content in stainless steel by scanning electron microscope-energy dispersive spectrometry. , 2020, 40(4): 49-53.
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