Determination of thickness of gold nano-film based copper by scanning electron microscope energy disperse spectroscopy with CASINO simulation
WANG Dingding1, MA Xian1, LIU Qingkai1, LIU Tao1,2
1. Institute of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300180, China; 2. Science and Technology on Particle Transport and Separa-Tion Laboratory,Tianjin 300180, China
Abstract：With Au nano-film based Cu as study object, the interaction between electron beam and material was simulated and calculated with CASINO software. The X-ray distribution and X-ray emission intensity of the samples with different nano-film thickness (10-1 000 nm) and different acceleration voltages (15 and 20 kV) were obtained. Under different acceleration voltages, the relationship curves of the thickness with KAu, that was the signal intensity ratio of Au film to pure Au, were established. Four samples with different thickness were determined by scanning electron microscope-energy dispersive spectrometer (SEM-EDS) to obtain the values of KAu. Then the film thicknesses of samples were calculated by the relationship curve. The determination results of Auger electron spectrometer(AES) were used as the reference values to judge the measurement error of this method. The results showed that the determination range of film thickness was 10-200 nm at acceleration voltage of 15 kV, and 10-300 nm at 20 kV. The tendencies of thickness curve at different acceleration voltages were the same. For the Au nano-film based Cu with thickness of 30-50 nm, the results was more accurate at 20 kV, and the measurement relative errors were all less than 10%, which could meet the measurement requirements of nano-film thickness in routine inspection.
王丁丁, 马贤, 刘庆凯, 刘涛. CASINO模拟用于扫描电镜能谱法测定铜镀金纳米薄膜厚度[J]. 冶金分析, 2023, 43(9): 49-55.
WANG Dingding, MA Xian, LIU Qingkai, LIU Tao. Determination of thickness of gold nano-film based copper by scanning electron microscope energy disperse spectroscopy with CASINO simulation. , 2023, 43(9): 49-55.
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