Abstract：In this paper, the application of X-ray fluorescence spectrometer in the analysis of rare earth in recent twenty years was reviewed. The X-ray fluorescence spectrometric analysis methods of rare earth elements were summarized in environment, mineral, rare earth enrichment, simple rare earth compound, rare earth metal, alloy, rare earth functional materials and process analysis. The detection methods were related to many fields such as steel & iron, non-ferrous metal, petrochemical industry, geology, biology and electronic material. The application of X-ray fluorescence spectrometry in rare earth industry was prospected.
