Abstract：The polycrystalline silicon sample was digested in a closed system. Then, the content of phosphorus in polycrystalline silicon was determined by phosphorus molybdenum blue spectrophotometry. The effect of several factors including acidity, dosage of colouring agent and reducing agent on determination was discussed to optimize the experimental parameters. At maximum absorption wavelength of 829 nm, the linear range of phosphorus was 0-4.0 μg/mL with correlation coefficient of 0.999 8. The detection limit was 0.04 μg/mL. In the determination of phosphorus in polycrystalline silicon sample by this method, large amounts of silicon were removed during sample dissolution by adding hydrofluoric acid, and excessive hydrofluoric acid was complexed with boric acid, so that the determination of phosphorus was not affected. The proposed method was simple in the operation,and had relatively high sensitivity. The relative standard deviations （RSD） of analytical results of phosphorus in sample were 2.5 %-3.5 %, and the recoveries of standard addition were 93.3 %-99.8 %.
李核*，田俊，黄艳芳，蔡燕娜, 陈红雨. 密闭消解磷钼蓝光度法测定多晶硅中磷[J]. 冶金分析, 2011, 31(8): 61-64.
LI He*, TIAN Jun, HUANG Yan-fang, CAI Yan-na, CHEN Hong-yu. Determination of phosphorus in polycrystalline silicon by phosphorus molybdenum blue spectrophotometry with closed digestion. , 2011, 31(8): 61-64.
